Test & Research Infrastructure
Overview of the available test and research infrastructure
Cleanroom
A large part of the test and processing equipment is located within the UGent cleanroom on the campus Tech Lane Ghent Science Park. The cleanroom is an environment with a controlled level of contamination that is specified by the number of particles (e.g. dust) per cubic meter at a specified particle size. The low level of particles in the cleanroom is a requirement for the nano- and microfabrication of chips and systems.
Equipment for lithography (pattern definition)
EVG 620 double-sided mask aligner
The mask aligner is used to transfer a pattern to a photosensitive material by selective exposure (through a mask) to a UV radiation source. The equipment supports several modes (proximity, soft / hard / vacuum contact) and can also do bottom side alignment. It can also be used in nano-imprint mode, where the pattern is transferred by imprinting.
Equipment for layer deposition
Equipment for material structuring
3D Micromac microSTRUCT vario ps/fs Laser setup
Pico- and femtosecond laser setup ideally suited for laser structuring, cutting, drilling and welding applications on a variety of substrates, e.g. metals, semiconductors, alloys, transparent and biological material, ceramics and thin film compound systems. The setup is equipped with following lasers: femtosecond pulse laser at 1030.5nm; picosecond pulse laser at 1064nm, 532nm and 355nm
Equipment for etching
Equipment for inspection
FEI Nova 600 Nanolab Dual-Beam FIB-SEM
SEM (Scanning Electron Microscope) can be used for inspection of samples with resolution down to nanometer scale. The FIB (Focused Ion Beam) column can be used for making cross-sections in virtually any material and gives the option to look "into" the material. FIB also allows to directly pattern materials with nanometer resolution. Options include electron backscatter diffraction (EBSD, for evaluation of microstructure of material), several etch gas injectors, Auto-slice&View and nanomanipulators for TEM-slice preparation.
Equipment for assembly
K&S Manual Wedge Bonder model 4523
Manual wedge bonding of:
- aluminium wire: 18um and 32um, 30/45deg and deep acces wedges.
- gold wire: 38um (deep acces) and 76.2x25.4 ribbon (deep acces).
This model offers the versatility to bond simple discrete devices, chip on board, up to complex hybrid, microwave devices. A bonding head with a deep access option and tail adjust system supports deep cavity microwave applications where tight control over the tail length is essential. With the small 18um wire capability the creation of short wires with low loops to support RF devices is possible. A manual Z mode allows operator control over looping and wire length, providing excellent resuslts for tight spaces or unusual loop requirements.
Liquid crystal device assembly
Several devices for assembly of liquid crystal devices including spin coater, dip coater, Asymtek Dispensemate, Oxford Instruments rubbing machine, UV OmniCure UV illumination, several ovens (including high temperature annealing oven), temperature controlled vacuum filling equipment, inspection microscope.
Equipment for testing
Equipment for electrical measurements
Oscilloscopes & logic analyzers
- Agilent DSO-X 2004A oscilloscopes (4 analog channels, 70MHz bandwidth)
- Agilent MSO6012A mixed signal oscilloscope (2 analog +16 digital channels, 100 MHz bandwidth)
- Agilent MSO7054A mixed signal oscilloscope (4 analog + 16 digital channels, 500MHz bandwidth)
- Tektronix TDS5104B oscilloscope (4 analog channels, 1GHz bandwidth). Can be coupled with the Tektronix TLA5250 logic analyzer.
- Tektronic TLA5250 digital logic analyzer (68 channels, 4 are clock channels)
- LeCroy waveRunner 44Xi (400MHz, 4 channel, 5 GS/s)
Sourcemeters, digital multimeters & parametric analyzers
- Keithley 236 SMU
- Keithley 237 high voltage SMU
- Keithley 2400 and 2401 SMU
- Keithley 6220 DC current source + Keithley 2182A nanovoltmeter for delta mode measurements
- Keithley 3706A DMM + six 3720 Dual 1x30 Multiplexer cards
- Keithley 4200-SCS Parametric analyzer with 3 Medium Power Source-Measure units, 1 High Power source-Measure unit (all with remote PreAmp for sub femto-ampere measurements) and a Capacitance-Voltage unit installed.
Miscellaneous
- Surface insulation resistance testing system (AutoSir Gen3 Systems)
- Chroma 19052 HiPot tester to verify electrical insulation (5 kV AC, 6 kV DC)
- RIGOL DG5072 two channel function / arbitrary waveform generator (70 MHz bandwidth, 1 GSa/s)